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Fabrication trends for free-space microoptics

期刊

JOURNAL OF LIGHTWAVE TECHNOLOGY
卷 23, 期 2, 页码 633-646

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JLT.2004.842302

关键词

diffractive optics; fabrication; integration; lithography; manufacturing; microoptics; replication

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In this paper, we discuss likely trends for manufacturing of free-space microoptics, focusing primarily on diffractive and refractive components. A brief historical overview of microoptics fabrication is presented, followed by our predictions on the future of the field. Examples of future applications, technical challenges, and supporting technologies required for manufacturing of different types of microoptics are discussed.

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