期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 114, 期 1, 页码 69-73出版社
SPRINGER
DOI: 10.1007/s00339-013-8083-7
关键词
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Large area linear and crossed grating structures on steel surfaces are obtained by UV-femtosecond-laser ablation at 248 nm. High resolution on large areas is secured using a beam delivery system based on a two-grating interferometer. Thus, deterministic gratings with periods down to 330 nm and modulation depths of more than 100 nm are fabricated on tool steel and stainless steel. Areas of up to mm can be processed without stitching errors.
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