期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 108, 期 2, 页码 415-421出版社
SPRINGER
DOI: 10.1007/s00339-012-6901-y
关键词
-
资金
- National Natural Science Foundation of China [90923038, 90923024]
- National Basic Research Program of China (973 Program) [2011CB706703]
Three-dimensional molecular dynamics simulations using the Tersoff potential are conducted to investigate the nanoindentation process of monocrystalline germanium (Ge). It is found that a phase transformation from fourfold-coordinated diamond cubic phase (Ge-I) to sixfold-coordinated beta-tin phase (Ge-II) occurs during the nanoindentation process. The simulation results suggest that a pressure-induced phase transformation instead of dislocation-assisted plasticity is the dominant deformation mechanism of monocrystalline Ge thin films during the nanoindentation process.
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