Modeling of electrically actuated elastomer structures for electro-optical modulation

A transparent elastomer layer sandwiched between two metal electrodes deforms upon voltage application due to electrostatic forces. This structure can be used as tunable waveguide. We investigate structures of a polydimethylsiloxane (PDMS) layer with 1-30 mu m thickness and 40 nm gold electrodes. For extended electrodes the effect size may be calculated analytically as a function of the Poisson ratio. A fully coupled finite-element method (FEM) is used for calculation of the position-dependent deformation in case of structured electrodes. Different geometries are compared concerning actuation effect size and homogeneity. Structuring of the top electrode results in high effect magnitude, but non-uniform deformation concentrated at the electrode edges. Structured bottom electrodes provide good compromise between effect size and homogeneity for electrode widths of 2.75 times the elastomer thickness.