Parallel laser microfabrication of terahertz metamaterials and its polarization-dependent transmission property

Large-area split ring resonator (SRR) array was fabricated by femtosecond laser micro-lens array lithography at a fast speed. Transmission spectra of the SRR arrays at different incident terahertz wave polarization states were characterized by terahertz time domain spectroscopy. A polarization-dependent transmission property of the SRR array was observed. Polarization-dependent loss (PDL) spectrum was characterized to investigate the polarization properties of the terahertz metamaterials. The PDL characterization can eliminate the substrate effect and provide a flexible platform to study the characteristics of free-standing terahertz metamaterials.