期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 99, 期 1, 页码 145-150出版社
SPRINGER
DOI: 10.1007/s00339-010-5597-0
关键词
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资金
- BMBF nanoQUIT
- DFG [SPP1285]
Four different liquid metal ion sources (LMIS), working with pure Bi as well as with Bi containing alloys (Au(13)Bi(87), Ga(38)Bi(62), Ga(35)Bi(60)Li(5)) were investigated with respect to the emission behavior as a function of current and temperature, the mass spectra and the energy distribution of the individual ion species. Additionally, for the pure Bi-LMIS the sputtering rates for Bi ions and clusters on Si, SiO(2) and Ge substrates were compared with that of Ga projectile ions using a mass separating focused ion beam system.
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