期刊
VACUUM
卷 77, 期 3, 页码 223-229出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2004.08.023
关键词
sensor; carbon nanotube; methane
Carbon nanotubes and nanofibres deposited by an electrodeposition technique were utilized to fabricate sensor material for the detection of methane. Carbon nanotubes (CNT) and nanofibres were grown on Si(001) substrate using acetonitrile (1% v/v) and water as electrolyte at an applied d.c. potential similar to 20 V. Sensing properties were studied with as-deposited CNT films. It was found that the films showed good sensing properties at room temperature. (c) 2004 Elsevier Ltd. All rights reserved.
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