期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 80, 期 6, 页码 1141-1151出版社
SPRINGER HEIDELBERG
DOI: 10.1007/s00339-004-3151-7
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This paper presents an overview of the issues related to the integration of carbon nanotubes into microelectronics systems. Particular emphasis is placed on the use of carbon nanotubes as on-chip wiring (interconnects) and active devices (transistors), the two main building blocks of current semiconductor circuits. The properties of state-of-the art devices are compared in order to test the viability of replacing silicon-based components with carbon nanotubes. Further, the problems associated with the construction of nanotube-based devices are discussed.
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