Characterization of a wavelength-tunable antenna-coupled infrared microbolometer

Wavelength tuning is demonstrated in an antenna-coupled infrared microbolometer. With a 300-mV control voltage, we observed a tuning range of 0.5 mu m near 10 mu m. A metal-oxide-semiconductor capacitor underneath the antenna arms causes the shift of resonance wavelength with applied voltage. We develop a device model that agrees well with measured results. (c) 2005 Society of Photo-Optical Instrumentation Engineers.