期刊
APPLIED OPTICS
卷 52, 期 4, 页码 613-624出版社
OPTICAL SOC AMER
DOI: 10.1364/AO.52.000613
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资金
- National Science Foundation (NSF)
- NSF Engineering Research Center for Integrated Access Networks (CIAN)
- Defense Advanced Research Projects Agency (DARPA)
- Army Research Office (ARO)
- Cymer Corporation
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [1229677] Funding Source: National Science Foundation
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [0901429] Funding Source: National Science Foundation
This paper reviews recent work in the area of silicon photonic devices and circuits for monolithic and heterogeneous integration of circuits and systems on a chip. In this context, it presents fabrication results for producing low-loss silicon waveguides without etching. Resonators and add-drop distributed filters utilizing sidewall modulation fabricated in a single lithography and etching step are demonstrated. It also presents an optical pulse compressor that monolithically integrates self-phase modulation and anomalous dispersion compensation devices on a silicon chip. As an example of heterogeneous integration, we demonstrate vertical emitting metallo-dielectric nanolasers integrated onto a silicon platform. Future research directions toward large-scale photonic circuits and systems on a chip also are discussed. (C) 2013 Optical Society of America
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