期刊
APPLIED OPTICS
卷 52, 期 17, 页码 4072-4076出版社
OPTICAL SOC AMER
DOI: 10.1364/AO.52.004072
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资金
- National Basic Research Program of China (973 Program) [2012CB315703]
- Key Projects of International Cooperation NSFC [61120106001]
- Program for New Century Excellent Talents [NCET-10-0520]
- Tsinghua National Laboratory for Information Science and Technology (TNList) cross-discipline Foundation
- Natural Sciences and Engineering Research Council of Canada (NSERC)
- Burroughs Wellcome Fund
We report an ultrafast web inspector that operates at a 1000 times higher scan rate than conventional methods. This system is based on a hybrid dispersion laser scanner that performs line scans at nearly 100 MHz. Specifically, we demonstrate web inspection with detectable resolution of 48.6 mu m/pixel (scan direction) x 23 mu m (web flow direction) within a width of view of 6 mm at a record high scan rate of 90.9 MHz. We demonstrate the identification and evaluation of particles on silicon wafers. This method holds great promise for speeding up quality control and hence reducing manufacturing costs. (C) 2013 Optical Society of America
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