Angular distribution of sputtered particles and surface morphology: the case of beryllium under a krypton beam at various incidences

A beryllium target is bombarded with 5 keV krypton ions at incidence angles of 0 degrees and 70 degrees. The sputtered material is collected oil a Mylar cylindrical foil surrounding the target, the foil is cut into pieces and the deposit on them is measured by inductively coupled plasma optical emission spectroscopy (ICP-OES). Experiment is combined with simulations using the computer code OKSANA. The method supplies accurate angular distributions of sputtered particles. The surface morphology is observed by scanning electron micrography. Depending on the incidence angle, sputtering forms craters and rippled areas or deep grooves. The resulting differences between simulations and experiment are explained qualitatively. (c) 2004 Elsevier B.V. All rights reserved.