期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 15, 期 4, 页码 736-746出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/15/4/010
关键词
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A complete set of approximate, closed-form expressions, obtained with small displacements theory, for the spring constants of two kinds of serpentine springs (classic and rotated) is presented. The expressions are proposed as a tool for rapid design of microelectromechanical structures. The two designs are also studied numerically using the finite element method (FEM): analytical calculations and FEM simulations are compared. A comparison between the performances of the two designs is also briefly presented.
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