期刊
THIN SOLID FILMS
卷 476, 期 1, 页码 137-141出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2004.09.048
关键词
amorphous materials; optical coatings; ellipsometry; optical spectroscopy
Ellipsometric and spectroscopic investigations of Hf1-xZrxO2 thin films were performed. Dispersion dependences of refractive indices and extinction coefficients in the wavelength interval 0.2-0.7 mu m were obtained by optical-refractometric synthesis of absorption spectra. Optical-refractometric relation is applied to describe the dispersion of the refractive indices. Compositional behaviour of optical pseudogap and refractive indices of HfO2-ZrO2 thin films is studied. (c) 2004 Elsevier B.V. All rights reserved.
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