期刊
IEEE TRANSACTIONS ON PLASMA SCIENCE
卷 33, 期 2, 页码 560-561出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TPS.2005.844990
关键词
analytical atomic emission spectrometry; microwave plasma
A stable microstrip microwave plasma (MSP) operated at atmospheric pressure with a power of some 10-20 W and at a gas flow of 0.2-0.8 L/min of argon in a resonant structure produced with the aid of microstructuring technology on a 5 x 5 cm(2) quartz wafer provided with a 0.6-mm diameter plasma channel is described. The device is shown to be useful for the excitation of atomic and molecular species and for the atomic emission spectrometric determination of metals and of nonmetals in gases at the trace level, down to the ng/L-level, as shown for the case of sulfur.
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