期刊
APPLIED MATHEMATICAL MODELLING
卷 37, 期 10-11, 页码 6964-6978出版社
ELSEVIER SCIENCE INC
DOI: 10.1016/j.apm.2013.02.034
关键词
MEMS; Static and dynamic stability; Electrostatic actuation; Modifified couple stress theory; Functionally graded materials; Temperature changes
Stability of a functionally graded (FG) micro-beam, based on modified couple stress theory (MCST), subjected to nonlinear electrostatic pressure and thermal changes regarding convection and radiation, is the main purpose of this paper. It is assumed that the functionally graded beam, made of metal and ceramic, follows the volume fraction definition and law of mixtures, and its properties change as an exponential function through its thickness. By changing the ceramic constituent percent of the bottom surface, five different types of the micro-beams are investigated. The static pull-in voltages in presence of temperature changes are obtained by using step-by-step linearization method (SSLM) and, by adapting Runge-Kutta approach, the dynamic pull-in voltages are obtained numerically. Though the temperature distribution through the thickness of FG micro-beam (due to its too small measurement) is considered uniform, owing to the different thermal expansions of layers, temperature changes cause deflection in the micro-beam, and consequently affect pull-in values. Hence the profound effects of different material constituent over the pull-in voltages are illustrated and it is graphically displayed that how in some cases neglecting components of the couple stress leads to inaccurate results. (C) 2013 Elsevier Inc. All rights reserved.
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