期刊
APPLIED MATHEMATICAL MODELLING
卷 36, 期 5, 页码 1875-1884出版社
ELSEVIER SCIENCE INC
DOI: 10.1016/j.apm.2011.07.080
关键词
Pull-in instability; Free vibration; Geometrical nonlinearity; Casimir force; Functionally graded material; Curved ground electrode
资金
- Research Grant Council of Hong Kong [114911]
This paper investigates the pull-in instability and free vibration of functionally graded poly-SiGe micro-beams under combined electrostatic force, intermolecular force and axial residual stress, with an emphasis on the effects of ground electrode shape, position-dependent material composition, and geometrically nonlinear deformation of the micro-beam. The differential quadrature (DQ) method is employed to solve the nonlinear differential governing equations to obtain the pull-in voltage and vibration frequencies of the clamped poly-SiGe micro-beams. The present analysis is validated through direct comparisons with published experimental results and excellent agreement has been achieved. A parametric study is conducted to investigate the effects of material composition, ground electrode shape, axial residual stress and geometrical nonlinearity on the pull-in voltage and frequency characteristics. (C) 2011 Elsevier Inc. All rights reserved.
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