Static pull-in analysis of electrostatically actuated microbeams using homotopy perturbation method

In this study, static pull-in instability of electrostatically-actuated microbridges and micro-cantilevers is investigated considering different nonlinear effects. Galerkin's decomposition method is utilized to convert the nonlinear differential equations of motion to nonlinear integro-algebraic equations. Afterward, analytic solutions to static deflections of the microbeams are obtained using the homotopy perturbation method. Results are in excellent agreement with those presented in the literature. (C) 2009 Elsevier Inc. All rights reserved.