期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
卷 44, 期 5B, 页码 3591-3595出版社
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.44.3591
关键词
stamper surface temperature; micro/nano molding process; solidified layer; injection mold; MEMS heater; MEMS RTD sensor; high density optical disc
It is a very critical process to control the temperature of stamper surface in the micro/nano molding. During the filling stage, the polymer melt in the vicinity of the stamper surfaces rapidly solidifies and the solidified layer greatly deteriorates the transcribability and fluidity of polymer melt. To improve the transcribability and fluidity of polymer melt, stamper surface temperature should be controlled such that the growth of the solidified layer is delayed during the filling stage. In this study, an injection mold was prepared with microelectromechanical systems (MEMS) resistance temperature detector (RTD) sensor and MEMS heater to increase the stamper surface temperature over the glass transition temperature during the filling stage. We could control the stamper surface temperature up to 100 degrees C within a few seconds using the fabricated MEMS heater. Finally, the high density optical disc substrates were replicated using the injection mold with MEMS heater and MEMS sensor.
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