期刊
出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.nimb.2005.03.074
关键词
nano-tool; nano-net; FIB-CVD; 3-D; subcellular operation
High performance nano-tools are very important for nano-scale operations and analysis in various researches. To achieve best performance, tools should be made as three-dimensional (3-D) nano-structured devices. Therefore, we have fabricated 3-D nano-tools by using focused-ion-beam chemical-vapor-deposition (FIB-CVD). Most recently, we used FIB-CVD to fabricate a novel 3-D nano-tool, a nano-net. Using this nano-net, we successfully captured polystyrene microspheres (diameter: 2.0 mu m). (c) 2005 Elsevier B.V. All rights reserved.
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