期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 76, 期 5, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.1903123
关键词
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The scanner that moves the sample stage in three dimensions is a crucial device that limits the imaging rate of atomic force microscopy. This limitation derives mainly from the resonant vibrations of the scanner in the z direction (the most frequent scanning direction). Resonance originates in the scanner's mechanical structure as well as in the z piezoactuator itself. We previously demonstrated that the resonance originating in the structure can be minimized by a counterbalancing method. Here we report that the latter resonance from the actuator can be eliminated by an active damping method, with the result the bandwidth of the z scanner nearly reaches the first resonant frequency (150 kHz) of the z piezoactuator. (c) 2005 American Institute of Physics.
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