相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。
Article
Engineering, Electrical & Electronic
Processing and characterization of silicon carbon-nitride ceramics: application of electrical properties towards MEMS thermal actuators
LA Liew et al.
SENSORS AND ACTUATORS A-PHYSICAL (2003)
Article
Engineering, Electrical & Electronic
Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer?
LA Liew et al.
SENSORS AND ACTUATORS A-PHYSICAL (2002)
Article
Engineering, Electrical & Electronic
Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique
LA Liew et al.
SENSORS AND ACTUATORS A-PHYSICAL (2001)
分享论文
