期刊
IEEE ELECTRON DEVICE LETTERS
卷 26, 期 5, 页码 311-313出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2005.846578
关键词
anneal; dislocations; effective field; effective mobility; germanium; germanium oxynitride (GOI); heteroepitaxy; hydrogen; mobility; MOS devices
We have successfully demonstrated high-performance p-MOSFETs in germanium grown directly on Si using a novel heteroepitaxial growth technique, which uses multisteps of hydrogen annealing and growth to confine misfit dislocations near the Ge-Si interface, thus not threading to the surface as expected in this 4.2% lattice-mismatched system. We used a low thermal budget process with silicon dioxide on germanium oxynitride (GeOxNy) gate dielectric and Si(0.75)Geo(0.25) gate electrode. Characterization of the device using cross-sectional transmission electron microscopy and atomic force microscopy at different stages of the fabrication illustrates device-quality interfaces that yielded hole effective mobility as high as 250 cm(2)/Vs.
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