Scanning Hall probe microscopy is a noninvasive magnetic imaging technique with potential for having a major impact in the data storage industry if high-resolution Hall effect sensors can be developed with sufficiently low-noise figures at room temperature. To meet this requirement, we have developed a series of second-generation quantum-well Hall probes whereby the careful design of an AlGaAs/InGaAs/GaAs pseudomorphic heterostructure, chip layout, metal interconnects, and passivation layers has allowed a dramatic reduction of low-frequency noise sources. In addition, the Johnson noise-limited minimum detectable fields of these sensors are more than an order of magnitude lower than those used in early microscopes. The key figures-of-merit of the sensors are presented and their performance illustrated in an imaging study of a yttrium-iron-garnet thin film at room temperature. (C) 2005 American Institute of Physics.
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