4.7 Article Proceedings Paper

The influence of the post-deposition treatment on some physical properties of Sb2S3 thin films

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JOURNAL OF NON-CRYSTALLINE SOLIDS
卷 351, 期 12-13, 页码 987-992

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DOI: 10.1016/j.jnoncrysol.2004.12.014

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The influence of a thermal treatment for 30 min from T = 300 K to T = 473 K, on the structural, electrical and optical properties of antimony trisulfide (Sb2S3) thin films has been investigated. The thin films deposited on a glass substrate by thermal vacuum evaporation at a substrate temperature T-S = 300 K have amorphous structure, but after annealing they change to a polycrystalline structure, while those deposited at T-S = 498 K have polycrystalline structure both before and after the heat-treatment. The structural modifications have a strong influence on the electrical and optical properties of the Sb2S3 thin films. (c) 2005 Elsevier B.V. All rights reserved.

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