4.6 Article

Comparison of an atmospheric pressure, radio-frequency discharge operating in the α and γ modes

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PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 14, 期 2, 页码 314-320

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IOP PUBLISHING LTD
DOI: 10.1088/0963-0252/14/2/013

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The alpha and gamma modes of an atmospheric pressure, radio-frequency plasma have been investigated. The plasma source consisted of two parallel electrodes that were fed with helium and 0.4 vol% nitrogen. The transition from alpha to gamma was accompanied by a 40% drop in voltage, a 12% decrease in current and a surge in power density from 25 to 2083 W cm(-3). Optical emission confirmed that sheath breakdown occurred at the transition point. The maximum light intensity shifted from a position 0.25 mm above the electrodes to right against the metal surfaces. The average density of ground-state nitrogen atoms produced in the atmospheric plasma was determined from the temporal decay of N-2(B) emission in the afterglow. It was found that 5.2% and 15.2% of the N-2 fed were dissociated into atoms when the plasma was operated in the alpha and gamma modes, respectively. The lower efficiency of the gamma discharge may be attributed to the non-uniform distribution of the discharge between the electrodes.

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