期刊
IEICE ELECTRONICS EXPRESS
卷 2, 期 9, 页码 311-315出版社
IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG
DOI: 10.1587/elex.2.311
关键词
vertical comb; process stiction; self-assembly; self alignment
We report a very simple and reliable method for making Self-Assembled Vertical Comb (SAVC) drive actuators by using the standard SOI bulk micro-machining processes. The initial angular offset of the movable combs is prepared by using the process stiction which occurs during drying process after sacrificial release. The optical scanner integrated with SAVC has shown good electrostatic scanning performance of over 1.0-degree static-rotation angle with a typical drive voltage of 20 V without any in-use electromechanical failure.
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