Resistive-type palladium structures for hydrogen sensing remains as a research focus for their simplicity in device construction. We demonstrate that a siloxane self-assembled monolayer placed between a substrate and an evaporated ultrathin Pd film promotes the formation of small Pd nanoclusters and reduces the stiction between the palladium and the substrate. The resulting Pd nanocluster film can detect 2% H-2 with a rapid response time of similar to 70 ms and is sensitive to 25 ppm hydrogen, detectable by a 2% increase in conductance due to the hydrogen-induced palladium lattice expansion. (c) 2005 American Institute of Physics.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据