期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 120, 期 2, 页码 370-382出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2005.01.007
关键词
three-axial; force; microsensor; hybrid; biomechanics
This paper presents the design and development of a silicon-based three-axial force sensor to be used in a flexible smart interface for biomechanical measurements. Normal and shear forces are detected by combining responses from four piezoresistors obtained by ion implantation in a high aspect-ratio cross-shape flexible element equipped with a 525 mu m high silicon mesa. The mesa is obtained by a subtractive dry etching process of the whole handle layer of an SOI wafer. Piezoresistor size ranges between 6 and 10 mu m in width, and between 30 and 50 mu m in length. The sensor configuration follows a hybrid integration approach for interconnection and for future electronic circuitry system integration. The sensor ability to measure both normal and shear forces with high linearity (congruent to 99%) and low hysteresis is demonstrated by means of tests performed by applying forces from 0 to 2 N. In this paper the packaging design is also presented and materials for flexible sensor array preliminary assembly are described. (c) 2005 Elsevier B.V. All rights reserved.
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