The effects of oxygen radicals on sterilization were studied using a 2.45 GHz surface-wave oxygen plasma. A population of 1.5x10(6) Bacillus stearothermophilus spores was irradiated for 3 min or more with oxygen plasma, generated at pressures between 6 and 14 Pa. The decimal reduction value (D value), a measure of the effectiveness of sterilization, was determined to be about 15-25 s. Using only oxygen radicals, excluding all charged particles, the 1.5x10(6) spores were sterilized with a D value of 30-45 s after 5 min or more of irradiation. On scanning electron microscopy, the length and width of the spores changed significantly due to chemical etching by oxygen radicals. (c) 2005 American Institute of Physics.
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