期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 121, 期 1, 页码 253-261出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2004.12.022
关键词
flow sensor; shear-stress sensor; pressure sensor; temperature sensor; microchannel flow
This paper reports the development of a MEMS multi-sensor chip that enables the simultaneous measurements of shear stress, pressure, and temperature inside microchannels. On the multi-sensor chip, five sensor clusters, which consist of shear-stress, pressure, and temperature sensors, are arranged in a one-dimensional array. The multi-sensor chip has been characterized in a rectangular microchannel using both incompressible and compressible gas flows. A simple normalization method has proven to be effective in the reduction of the sensitivity variation of the shear-stress sensors. It has also been found out that the classical theory for conventional hot-film sensors needs to be modified for the MEMS thermal shear-stress sensors. Furthermore, flow rate measurements based on both differential pressure and thermal anemometry principles have been demonstrated using the multi-sensor chip. (c) 2004 Elsevier B.V. All rights reserved.
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