Differential cross-section of the D(3He, p)4He nuclear reaction and depth profiling of deuterium up to large depths

The differential D(He-3,p)He-4 reaction cross-section was determined at a laboratory angle of 135 degrees for He-3 energies between 0.5 and 6 MeV. Deuterium depth profiles are determined from the measurement of the proton yield as a function of incident He-3 energy with following deconvolution of the obtained yield function. This allows deuterium depth profiling to very large depths. Deuterium depth profiling to a depth of 7 mu m, in W and 50 pm in B4C is demonstrated. The accuracy of the method is discussed. (c) 2005 Elsevier B.V. All rights reserved.