期刊
NANO LETTERS
卷 5, 期 6, 页码 1157-1160出版社
AMER CHEMICAL SOC
DOI: 10.1021/nl050405n
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资金
- NHGRI NIH HHS [R01 HG002338-03, R01 HG002338, R01HG02338] Funding Source: Medline
Nanostructures can be patterned with focused electron or ion beams in thin, stable, conformal films of water ice grown on silicon. We use these patterns to reliably fabricate sub-20 nm wide metal lines and exceptionally well-defined, sub-10 nanometer beam-induced chemical surface transformations. We argue more generally that solid-phase condensed gases of low sublimation energy are ideal materials for nanoscale patterning, and water, quite remarkably, may be among the most useful.
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