期刊
THIN SOLID FILMS
卷 482, 期 1-2, 页码 305-310出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2004.11.193
关键词
carbon nano-structure; PLD deposition; NEXAFS and Raman spectroscopy
Nano-structured carbon films have been proved to be outstanding materials for different kinds of applications, mainly electronic, owing to their high electron field emission properties, but also energetic (hydrogen storage, fuel cells), catalytic (very high metal catalyst dispersion properties) or biological (very good bio-sensor support). In this work we studied the influence of experimental conditions (vs. substrate temperature, working pressure and inert sustaining gases) on the structure evolution of carbon films, from an almost amorphous material to nano-clustered graphene particles. The carbon films were grown by Pulsed Laser Ablation (Nd:YAG, 2nd harmonic: lambda=532 nm, hv=2.33 eV, tau=7 ns, v=10 Hz, Phi approximate to 7 J/cm(2)), from a pyrolytic graphite target on Si < 100 > substrates. PLD depositions were performed at increasing temperature, ranging from room temperature to 900 degrees C, both in vacuum and in He atmosphere, at similar to 20 Pa. Near-edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopy evidenced the aromatic ring formation and the clustering condensation process with increasing surface temperature. The surface roughness and morphology of films grown at different conditions have been characterised by atomic force microscopy (AFM) and scanning electron microscopy (SEM). (c) 2004 Elsevier B.V. All rights reserved.
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