Morphological studies of nanostructures from directed cluster beam deposition

Tin clusters with a most probable size of 2.2 nm are formed from a magnetron plasma aggregation cluster source and deposited on the amorphous carbon and silicon surface. The morphologies of the cluster-based nanostructures formed by directed cluster beam deposition with different cluster energies and incident angles are analyzed based on the transmission electron microscope (TEM) and atomic force microscope (AFM) observation.