Optical interconnect modules with fully integrated reflector mirrors

A robust and cost-effective technology for integration of 45 degrees reflector mirrors and polymer waveguides (WGs) into optical interconnect (01) substrates is developed. The planar WGs are formed from photopatternable polymers with propagation losses as low as 0.05 dB/cm. The mirrors with losses of 0.5-0.8 dB are fabricated by the microdicing technique allowing lateral and vertical positioning of the mirror plane within several microns. A prototype 01 module with integrated channel WGs, mirrors, and assembled connectors is fabricated and successfully tested at 10-Gb/s transmission rate.