期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 52, 期 7, 页码 1519-1526出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2005.850954
关键词
active-matrix (AM); organic thin-film transistors (OTFTs); pentacene; twisted-nematic liquid crystal display (TNLCD)
We have demonstrated an organic thin-film-transistor (OTFT)-driven active-matrix twisted-nematic liquid crystal display (AM-TN-LCD) on a glass substrate, with a resolution of 160 x 120 pixels, 79 ppi. Substrate temperature was kept below the plastic-compatible temperature of 180 degrees C throughout the fabrication process. In order to realize an OTFT-driven display with fine resolution, we employed short-channel bottom-contact (BC) pentacene OTFTs. It has been known that their drivability is limited by contact resistance at source/drain (S/D). We found that the S/D contact resistance was markedly reduced when, the thickness of the nonohmic Ti adhesion layer for ohmic An S/D electrodes was reduced less than similar to 3 nm. We elucidate that this 3 nm corresponds to the thickness of the accumulating layer in a pentacene channel. When we use a self-assembled monolayer of mercapto-silane-coupling agent as,the adhesion layer, the contact resistance becomes negligibly small and BC OTFTs scalable below 10 pm were obtained. In addition to this OTFT-cell technology, we developed a low-damage pentacene patterning technique for integration of OTFTs and introduced low-temperature panel assembly process to suppress thermal-stress degradation of pentacene OTFTs, which are the key technologies to achieve OTFT-driven AM-TN-LCD.
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