期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
卷 44, 期 7B, 页码 5646-5650出版社
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.44.5646
关键词
EB-CVD; amorphous carbon nanopillar; lateral growth; growth manner; Young's modulus; deflection measurement
We investigated the growth manner and mechanical characteristics of amorphous carbon (a-C) nanopillars formed by electron-beam-induced chemical vapor deposition (EB-CVD). The pillars' inclinations were well explained if we assumed the vertical growth rate to be almost constant within a specified distance from the substrate. The pillars' Young's modulus evaluated by deflection measurement was approximately 29 GPa, which was almost equivalent to that of bismuth, but much smaller than that observed in focused ion-beam-induced chemical vapor deposition (FIB-CVD) pillars.
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