Micromachining approach in fabricating of THz waveguide components

In this paper, we describe our progress in micromachining of submillimeter waveguide structures such as a quadrature waveguide coupler which is a part of a THz balanced heterodyne receiver. We have set up and developed pilot testing of the micromachining process with required high quality of structure. (c) 2005 Elsevier Ltd. All rights reserved.