期刊
MICROELECTRONIC ENGINEERING
卷 81, 期 1, 页码 83-89出版社
ELSEVIER
DOI: 10.1016/j.mee.2005.04.001
关键词
carbon nanotube; dielectrophoresis; assembly
We present a mass productive and reproducible assembly technique of a single bundle of single-walled carbon nanotubes (sb-SWNTs) using dielectrophoresis (DEP). Gold electrodes with 10 gaps made via microlithography were used to align the carbon nanotubes (CNTs). The magnitude and type of applied electric field were investigated to verify their effects on CNT assembly. The optimum assembling conditions in which sb-SWNTs could be positioned at a desired site were experimentally identified, and the characteristics of the assembled sb-SWNTs were evaluated from AFM, Raman spectroscopy, and I-V curve. This assembly method has potential for applications, such as gas sensors or electronic devices. (c) 2005 Elsevier B.V. All rights reserved.
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