期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 122, 期 1, 页码 108-112出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2005.03.063
关键词
optical switch; vanadium oxide thin film; semiconductor-to-metal phase transition; insertion loss
This paper presents an optical switch based on a vanadium dioxide VO2 thin film fabricated on quartz and Si substrates. Vanadium oxide thin films with 48 degrees C semiconducting-to-metal phase transition temperature are fabricated by reactive ion beam sputtering followed by a post-annealing process step. Optical tests at lambda = 1.55 mu m show that the insertion loss and contrast ratio of fabricated switches are 2 dB and more than 15 dB, respectively. Switching times under 1 ms have also been observed and the power consumption of an individual switch is less than 25 mW. (C) 2005 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据