High mobility two-dimensional electron system on hydrogen-passivated silicon(111) surfaces

We have fabricated and characterized a field-effect transistor in which an electric field is applied through an encapsulated vacuum cavity and induces a two-dimensional electron system on a hydrogen-passivated Si(111) surface. This vacuum cavity preserves the ambient sensitive surface and is created via room temperature contact bonding of two Si substrates. Hall measurements are made on the H-Si(111) surface prepared in aqueous ammonium fluoride solution. We obtain electron densities up to 6.5x10(11) cm(-2) and peak mobilities of similar to 8000 cm(2)/V s at 4.2 K. (c) 2005 American Institute of Physics.