期刊
SURFACE REVIEW AND LETTERS
卷 12, 期 4, 页码 515-518出版社
WORLD SCIENTIFIC PUBL CO PTE LTD
DOI: 10.1142/S0218625X05007359
关键词
rapid thermal oxidation; In2O3 thin films; figure of merit
Conductive transparent In2O3 thin films with (222)-preferred orientation were prepared by rapid thermal oxidation (RTO) in static air of indium thin films at condition 200 degrees C/30s. Detailed structural, electrical, and optical characteristics of the film are presented. The data are interpreted to give a direct bandgap of 3.6 eV and indirect bandgap, of 2.5 eV. The grown In2O3 films exhibited high figure of merit and sheet resistance as low as 20 ohm/sq. in the absence of any post-deposition annealing conditions. The mobility of these films was estimated to be 31 cm(2) (.) V-1 (.) s(-1). These results are compared with those of In2O3 films prepared by other methods.
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