期刊
OPTICS EXPRESS
卷 13, 期 17, 页码 6635-6644出版社
OPTICAL SOC AMER
DOI: 10.1364/OPEX.13.006635
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We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are processed. As an illustration, we present a high-precision, monolithic, glass-based, micro-displacement sensor. Our displacement sensor is made out of a single piece of glass through a two-step process based on femtosecond laser illumination followed by chemical etching. (c) 2005 Optical Society of America.
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