Design of ultraprecision machine tools with applications to manufacture of miniature and micro components

Currently, the underlying necessities for predictability, producibility and productivity remain big issues in ultraprecision machining of miniature/micro products. The demand on rapid and economic fabrication of miniature/micro products with complex shapes has also made new challenges for ultraprecision machine tool design. In this paper, the design for an ultraprecision machine tool is introduced by describing its key machine elements and machine tool design procedures. The focus is on the review and assessment of the state-of-the-art ultraprecision machining tools. It also illustrates the application promise of miniature/micro products. The trends on machine tool development, tooling, workpiece material and machining processes are pointed out. (c) 2005 Published by Elsevier B.V.