High-speed optical microscanner driven with resonation of lam waves using Pb(Zr,Ti)O3 thick films formed by aerosol deposition

A high-performance optical microscanner with a resonance frequency over 20 kHz and a scan angle (peak-to-peak value) over 30 degrees in atmospheric ambient, was successfully fabricated by deposit piezoelectric materials at a high rate by the AD method onto a metal scanner structure, which was fabricated by mechanical machining. The scanner is applicable to SVGA high resolution display of 800 x 600 or more. This method is a powerful tool for realizing ceramic integration with metal components.