期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
卷 44, 期 9B, 页码 7072-7077出版社
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.44.7072
关键词
aerosol deposition; optical scanner; PZT; actuator; MEMS; thick film
A high-performance optical microscanner with a resonance frequency over 20 kHz and a scan angle (peak-to-peak value) over 30 degrees in atmospheric ambient, was successfully fabricated by deposit piezoelectric materials at a high rate by the AD method onto a metal scanner structure, which was fabricated by mechanical machining. The scanner is applicable to SVGA high resolution display of 800 x 600 or more. This method is a powerful tool for realizing ceramic integration with metal components.
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