期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 123-24, 期 -, 页码 111-115出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2005.03.025
关键词
cantilever; piezoresistive readout; SU-8; biosensor; electroplating
We have developed a cantilever sensor array with integrated piezoresistive readout. The cantilevers are placed in a micro channel and the chip is fabricated in the epoxy-based photoresist SU-8. Surface stress changes on the cantilever due to molecular adsorption are detected by encapsulated Au piezoresistors. High sensitivity can be obtained due to the low Young's modulus of SU-8 and the piezoresistive readout will make the sensor compact to enable a portable device. This article describes the fabrication and characterisation of the cantilever sensor as well as some preliminary measurements using alkanethiols. (C) 2005 Elsevier B.V. All rights reserved.
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