期刊
SURFACE & COATINGS TECHNOLOGY
卷 200, 期 1-4, 页码 739-743出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2005.02.071
关键词
a-C; H-free; sp(3)/sp(2); EELS; TEM
Electron energy loss spectroscopy (EELS) in a transmission electron microscope (TEM) was employed to estimate the sp(3) C content in magnetron sputtered H-free a-C coatings. The deconvolution procedure developed reduces considerably the error which is due to beam point spread function and sample thickness. The methodology has been applied to thin a-C films deposited through RF magnetron sputtering, and determined that, under the present values of ion current to the substrates (< 1 mA/cm(2)), a variation in energy of the upcoming ions (achieved through a variation in applied substrate bias) has a negligible influence on the C atoms hybridization. (c) 2005 Elsevier B.V. All rights reserved.
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