期刊
SURFACE & COATINGS TECHNOLOGY
卷 200, 期 1-4, 页码 814-817出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2005.01.051
关键词
optical spectroscopy; actinometry; reactive glow discharges
In conditions of N-2, and N-2-O(2)glow discharges at low power ( 30-150 W) and low gas pressure ( 0.1-50 Torr), the N- and O-atom densities can be determined by adding few percents of Ar gas as an actinometer and by measuring the Ar 1750.4, 811.5 nm, NI 744.2, 746.5, 821.6 nm and OI 777.3, 844.6 mn spectral line intensities. The actinometry control and calibration have to be obtained by TALIF for DC discharges and by NO titration for flowing microwave discharges. (c) 2005 Elsevier B.V. All rights reserved.
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