4.7 Article Proceedings Paper

Modification of electrode materials for plasma torches

期刊

SURFACE & COATINGS TECHNOLOGY
卷 200, 期 1-4, 页码 254-257

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ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2005.02.015

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work function; ion implantation; plasma torches

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As part of the studies of new materials to be used as electrodes for plasma torches, polycrystalline copper thin film substrates, obtained by depositing copper on silicon wafer using the Electron Beam technique, were implanted with low energy (20-50 keV) alkali ions. The samples, before and after implantation process, were analysed in terms of surface composition and work function changes. Although the implantation doses were low (3 x 10(15) ions/cm(2)), relatively high concentrations of alkali metals were detected on the surface, which yielded a work function decrease of 3-9% in relation to the copper value. (c) 2005 Elsevier B.V. All rights reserved.

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